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Solving TaC Coating Peeling on Rings Used in LPE Epitaxy Systems
2026-07-22Many LPE chip manufacturing machines utilize TaC coated rings. This coating helps maintain a stable, clean environment within the machine. As the coating wears, Cvd sic coating or chips off, tiny fragments can enter the machine, contaminating wafers ...
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Veeco Epitaxy Maintenance for Longer SiC-Coated Part Lifespan
2026-07-19In a Veeco chip maker, Cvd sic coating parts are constantly subjected to heat, plasma and gas flow in each run. Gradually this stress changes the surface of the parts over time even if they are still visually impeccable. Most plants found out that sm...
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Testing CVD TaC Coating Adhesion Strength and Peeling Risks
2026-07-16For special coatings on the graphite, CVD TaC and Cvd sic coating parts of high-temperature chip making machines, the bonding performance of the coating to the part is most important on the life of the parts. Weak bond causes small crack and peel in ...
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Why High-Purity Graphite Is Critical for SiC Epitaxy Defect Control
2026-07-14The quality of the silicon carbide (SiC) wafer produced is influenced by even subtle changes in the growth environment. An area that many don't consider is the graphite lining the reactor. It stands the test of the intense heat found inside the react...
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Why Gas Floating Disks Become Uneven in High-Temperature Epitaxy
2026-07-11The floating gas disks used in high temperature epitaxy processes provide stability to the wafers and keep them supported with uniform flow of gas. In the production environment, operators may observe that over a period of time these disks lose their...
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Safe AIXTRON Susceptor Cleaning Without Damaging CVD SiC Coating
2026-07-08The CVD SiC coated susceptor surface must remain clean, but is fragile and susceptible to damage due to poor handling procedures. In many fabs small mistakes in the cleaning procedures create a localized roughness or micro-scratches that affect wafer...
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